PEEMSpector

PEEM-Cu_step_decoration_Si_med

System description

This ultra-compact PEEM combines high performance with ease-of-use and adaptability to most pre-existing vacuum chambers equipped with a 4 flange. The field of view can be changed from 5 m to 500 m by turning of a single knob. No alignment of the instrument is necessary. Although it is less than 23 cm long and with a radius of less than 7 cm, this instrument guarantees a lateral resolution better than 30 nm! The necessary electronic components fit in any 19 rack using only 6 rack units.

Please contact us for more information or visit our components page for exchange parts and upgrades.